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实验研究了不同激光预处理参数对于纳秒激光多脉冲作用下HfO_2/SiO_2反射膜损伤形态转化的影响。通过对比两类损伤扩张性和对薄膜功能性破坏机制,提出激光预处理技术的重要意义在于抑制损伤形态转化过程。通过薄膜损伤形态分析揭示了激光预处理作用机制为节瘤缺陷的去除和亚表面吸收前驱体的形成两方面的综合作用。实验结果表明:预处理后薄膜损伤形态转化特征曲线向更高通量和更多发次方向平移。针对现有工艺下的薄膜,采用高通量、两台阶的预处理参数组合能够获得兼顾效率的最佳收益,其零几率损伤形态转化阈值最高可以提升140%。
The effect of different laser pretreatment parameters on the morphological changes of HfO_2 / SiO_2 reflective films under multi-pulse nanosecond laser irradiation was experimentally studied. By comparing two kinds of damage expansibility and the mechanism of functional damage to the thin film, it is proposed that the laser pretreatment technique is of great significance to suppress the damage morphological transformation process. Analysis of the damage morphology revealed that the laser pretreatment mechanism is the combination of the removal of the defect and the formation of the subsurface absorption precursor. The experimental results show that the morphological changes of lesion morphology after the pretreatment shift to higher fluxes and more haircuts. For the film under the current process, the optimal yield of both efficiency can be obtained by using the combination of high-throughput and two-stage pretreatment parameters, and the zero-probability damage morphological transformation threshold can be increased by up to 140%.