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本文计算了不同折射率膜层下，非对称法布里珀罗腔模式波长随膜层厚度的变化．分析了在膜层折射率较低时，模式波长随层厚的增加反而减小的机理，并在实验中研究这种现象．利用湿法腐蚀的方法移动模式波长，补偿由生长误差引入的模式波长偏差，从而做到模式波长可控，获得高消光比的器件．同时利用湿法腐蚀方法将模式波长调整到不同位置，测量了不同模式波长位置时器件的调制特性
In this paper, the variation of the wavelength of asymmetric Fabry-Perot cavity modes with the film thickness under different refractive index films is calculated. The mechanism that the mode wavelength decreases with the increase of the layer thickness when the refractive index of the film is low is analyzed, and the phenomenon is studied in the experiment. The method of wet etching is used to shift the mode wavelength to compensate for the mode wavelength deviation introduced by the growth error so as to achieve the device with controllable mode wavelength and high extinction ratio. At the same time, the wet etching method is used to adjust the mode wavelength to different positions, and the modulation characteristics of the device at different mode wavelength positions are measured