准分子激光器是效率最高、功率最强的紫外线光源。以往影响准分子激光器性能的主要问题是腐蚀,因为卤素气体(F_2或HC_1)会与激光头中元件发生反应,尤其是如果有微量的空气或湿气渗入等离子体管,反应就更强,腐蚀就更严重。通过反应产生的化学物质会猝灭激光作用,从而限制每次充气的使用寿命。此外,腐蚀颗粒污染光学元件表面,因而 Excimer laser is the most efficient, most powerful UV light source. In the past, the main problem affecting the performance of an excimer laser was corrosion, as the halogen gas (F_2 or HC_1) reacts with the components in the laser head. In particular, if a small amount of air or moisture penetrates into the plasma tube, the reaction is stronger and the corrosion More serious. The chemicals produced by the reaction quench the laser action, limiting the life of each charge. In addition, corrosive particles contaminate the surface of the optical element and thus