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报导了最新开发的MOCVD热力学分析软件———MOCVDTA,它是一个采用目前比较先进的VCS算法对MOCVD的稳态系统进行单参数及双参数模拟分析的软件。介绍了其功能、特点、使用方法以及适用条件,并且以AsH系统及GaAsCH系统为例进行了模拟,得到了很好的模拟结果。
Reported the latest development of MOCVD thermodynamic analysis software --- MOCVDTA, which is a software that uses the more advanced VCS algorithm to carry out single-parameter and two-parameter simulation analysis of MOCVD steady-state system. The functions, characteristics, using methods and applicable conditions are introduced, and the simulation of AsH system and GaAsCH system is taken as an example. Good simulation results are obtained.