【摘 要】
：
采用多弧离子镀技术制备了不同调制比的交替多元多层Zr/CrAlSiN复合涂层,通过交替沉积与间歇性接近不同靶材相结合的方法获得了Zr/[Al(Si)N/CrN]“层中层”结构,并对复合涂层的力学性能、无腐蚀时的摩擦磨损性能、无摩擦磨损时的腐蚀性能及海水环境中的腐蚀磨损性能进行了研究.结果 表明:该结构设计对涂层生长缺陷具有明显的抑制和修复作用;随着CrAlSiN层厚度比例增大,调制比为1∶6时Zr/[Al(Si)N/CrN]涂层的综合力学性能最佳;由于CrAlSiN层具有多层Al(Si)N/CrN结构,增
【机 构】
：
中国科学院宁波材料技术与工程研究所中国科学院海洋新材料与应用技术重点实验室浙江省海洋材料与防护技术重点实验室 宁波315201;中国科学院金属研究所沈阳材料科学国家研究中心 沈阳110016
论文部分内容阅读
采用多弧离子镀技术制备了不同调制比的交替多元多层Zr/CrAlSiN复合涂层,通过交替沉积与间歇性接近不同靶材相结合的方法获得了Zr/[Al(Si)N/CrN]“层中层”结构,并对复合涂层的力学性能、无腐蚀时的摩擦磨损性能、无摩擦磨损时的腐蚀性能及海水环境中的腐蚀磨损性能进行了研究.结果 表明:该结构设计对涂层生长缺陷具有明显的抑制和修复作用;随着CrAlSiN层厚度比例增大,调制比为1∶6时Zr/[Al(Si)N/CrN]涂层的综合力学性能最佳;由于CrAlSiN层具有多层Al(Si)N/CrN结构,增加CrAlSiN层厚度比例增加了复合涂层横向界面,从而提升了涂层腐蚀性环境中的阻隔作用,因此CrAlSiN层厚度比例的增加既可以提升无摩擦磨损时涂层的耐腐蚀性能,又可提升涂层摩擦开动后的耐腐蚀性能,并进一步降低涂层腐蚀和磨损的相互促进作用;当调制比为1∶6和1∶8时,Zr/[Al(Si)N/CrN]涂层在海水环境中展现出了较好的抗腐蚀磨损性能.
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