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为实现对F-P腔腔长的控制,设计了F-P腔腔长锁定控制系统。该系统以633nm稳频激光作为基准光源,通过控制系统驱动压电陶瓷调节F-P腔的腔长,以实现将F-P腔的谐振频率锁定到基准光源的频率上。实验结果表明,该方案切实可行,锁定后的F-P腔腔长的不确定度可达10-10量级。该方法在原子沉积技术中对于实现沉积台的稳定具有重要的指导意义。
In order to realize the control of F-P cavity length, the F-P cavity length lock control system is designed. The system uses a 633nm frequency-stabilized laser as a reference light source, and the piezoelectric ceramic is driven by the control system to adjust the cavity length of the F-P cavity so as to lock the resonant frequency of the F-P cavity to the frequency of the reference light source. The experimental results show that this scheme is feasible and the uncertainty of the locked F-P cavity length can reach 10-10 orders of magnitude. The method has important guiding significance for the stability of deposition platform in atomic deposition technology.