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目前校准大量低真空计的主要标准是膨胀式校准系统.在校准工作的实践中发现校准的数据都偏大,分析了数据偏大的原因.利用我国研制的磁悬浮规和美国 MKS 的电容规没有吸放气的优点,对静态系统进行了测试,作了容器表面的放气实验、膨胀比实验和读数方法实验.实验结果认为读数方法是造成校准数据偏大的主要原因.通过实验提出膨胀系统前级压的高度差应从油柱的底部量到顶部,这样读的偏差要比过去读数的偏差小一倍左右.
At present, the main standard for calibrating a large number of low-vacuum gauges is the expansion calibration system.It is found that the calibration data is too large in the practice of calibration and the reasons for the large data are analyzed.Using the maglev gauge developed in our country and the capacitance gauge of American MKS The experimental results show that the reading method is the main reason that the calibration data is too large.According to the experimental results, the expansion system The difference in level of the pre-pressure should be from the bottom of the oil column to the top so that the reading deviation is about one-fold less than the deviation of the previous reading.