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Y2002-63234-275 0300334提高大规模集成电路成品率故障分布特征算法=CharacteriFation algorithm of failure djstribution for LSIyield improvement[会,英]/Sugimoto,M.& Tanaka,M.//2001 IEEE Intemational Symposium on Semicon-ductor Manufacturing.—275～278(E)
Y2002-63234-275 0300334 Improving Characterization Algorithm of Failure Yield Distribution Problem for Large Scale Integrated Circuits 【Characterization of the djs distribution for LSIyield improvement [En, Eng] / Sugimoto, M. & Tanaka, M. 2001 IEEE International Symposium on Semicon- ductor Manufacturing.-275 ~ 278 (E)