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采用脉冲磁控溅射法制备了B掺杂ZnO(ZnO:B)纳米薄膜,并用X射线衍射(XRD)、扫描电子显微镜(SEM)和紫外-可见-近红外分光光度计分别研究了薄膜的结构和光学特性。结果表明:ZnO:B为多晶纳米薄膜,具有六方钎锌矿结构,且薄膜沿着c轴取向择优生长;在可见光和近红外光谱区的透光性能良好,其中在可见光区的平均透光率大于84%,而在近红外区的透光率随着波长增加而逐渐降低至45%。运用逐点无约束最优化法分析计算了薄膜的光学常数,在可见光区,ZnO:B纳米薄膜的光学常数随波长的变化很小且数值基本恒定,折射率约为2.0,而在紫外区,光学常数随波长的变化显著。
B-doped ZnO (ZnO: B) nanostructured thin films were prepared by pulsed magnetron sputtering and characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and UV-Vis-NIR spectroscopy. Structure and optical properties. The results show that ZnO: B is a polycrystalline nanofilm with hexagonal wurtzite structure, and the film preferentially grows along the c-axis orientation. The transmittance of ZnO: B in the visible and near-infrared spectral region is good, and the average transmittance in the visible region The rate is greater than 84%, whereas the transmittance in the near infrared region decreases gradually to 45% as the wavelength increases. The optical constants of the films were analyzed and calculated by the point-by-point unconstrained optimization method. In the visible region, the optical constant of ZnO: B nanostructures changed little with the wavelength and the value was almost constant. The refractive index was about 2.0. The optical constants vary significantly with wavelength.