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短波光学的迅猛发展和高精密光学仪器的需求日益增多,对高精度表面的加工与检测也随之重要起来。而在一般的干涉检测中,球面镜检测精度主要依赖参考镜的精度。利用 Jensen提出的干涉仪绝对校准理论可以去除参考镜的误差和干涉仪的附加波像差,从而提高被测件测量精度。在研究 Jensen绝对校准理论的基础上,提出一种利用泽尼克(Zernike)多项式进行波面相位转换的方法进行波面处理,并提出具体实施方案。对面形精度优于λ/37小凸球面进行测量得出了较好的结果,打破了标准镜头最优λ/20 的局限,使这一理论简单易行地赋予应用。从而实现了高精度检测球面面形。
The rapid development of shortwave optics and the demand for high-precision optical instruments are on the rise. The processing and testing of high-precision surfaces are also important. In the general interference detection, the accuracy of the spherical mirror detection mainly depends on the accuracy of the reference mirror. The interferometer absolute calibration theory proposed by Jensen can remove the error of the reference mirror and the additional wave aberration of the interferometer so as to improve the measurement accuracy of the DUT. Based on the study of Jensen’s absolute calibration theory, a method of wavefront transformation based on Zernike polynomials is proposed to deal with the wavefront and propose a specific implementation. The accuracy of surface shape is better than that of λ / 37 small convex spherical surface, and the better result is obtained. The limitation of the optimal λ / 20 of standard lens is broken, which makes the theory easy to be applied. In order to achieve high-precision detection of spherical surface.