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本文研究了Cu—Ag及Fe—Ti系多层膜和Fe—Cr及Fe—Ti系单层膜的低温(LN_2)离子束混合。用掠射X线衍射和透射电镜测定了多层膜混合样品的结构和亚稳相的热稳定性。结果表明,Cu—Ag及Fe—Ti系混合膜分别是单相亚稳的面心立方和体心立方固溶体,固溶体的点阵常数随成分近似成直线
In this paper, low temperature (LN_2) ion beam mixing of Cu-Ag and Fe-Ti multilayers and Fe-Cr and Fe-Ti monolayers was studied. The structure and the thermal stability of the metastable phase in the multilayer samples were measured by grazing X-ray diffraction and transmission electron microscopy. The results show that the Cu-Ag and Fe-Ti mixed films are single-phase metastable face-centered cubic and body-centered cubic solid solution. The lattice constants of the solid solution approximate linearly with the composition