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通过分析高功率激光装置内主要污染物成分及来源,研究其对大口径光学表面抗损伤能力的影响规律,得到装置光学表面洁净控制要求。利用扫描电镜对高功率激光装置内部的主要颗粒污染物进行取样分析;采用自然沉降的方法在光学元件表面制备污染物,并利用Nd∶YAG(SAGA-S)激光器研究其损伤阈值和损伤规律。研究结果表明,高功率激光装置内颗粒污染物的主要成分为金属、有机物和矿物质,占据比例分别为20%、40%和40%。激光辐照污染后的光学表面存在激光清洗和激光诱导损伤两种效应,当激光器能量密度超过10.9 J/cm2时,光学表面存在清洗作用。当激光能量密度超过14.6 J/cm2时,光学表面污染物引起损伤,且损伤随着污染物尺寸呈线性下降趋势。
By analyzing the components and sources of the major pollutants in the high power laser device, the influence law on the anti-damage ability of the large aperture optical surface is studied, and the requirements for the clean control of the optical surface of the device are obtained. Scanning electron microscopy (SEM) was used to sample and analyze the main particle contaminants inside the high power laser device. The natural sedimentation method was used to prepare the contaminants on the surface of the optical element. The damage threshold and damage of Nd: YAG (SAGA-S) laser were studied. The results show that the main components of particulate pollutants in high-power laser devices are metal, organic matter and minerals, accounting for 20%, 40% and 40% respectively. There are two effects of laser cleaning and laser induced damage on the optical surface after laser irradiation. When the laser energy density exceeds 10.9 J / cm2, there is a cleaning effect on the optical surface. When the laser energy density exceeds 14.6 J / cm2, optical surface contaminants cause damage, and the damage decreases linearly with the contaminant size.