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对氢气、硫化氢和氨等的检测通常使用钯膜栅场效应管。介绍一种新型铂膜栅场效应管传感器,它可以检测低浓度的磷烷,其机理与钯膜栅场效应管检测氢气不完全相同。还研究了温度对检测磷烷的影响,测定了不同浓度磷烷下铂膜栅场效应管的功函数值。当磷烷浓度在10~(-6)～1.5×10~(-5)范围内,信号与磷烷浓度的对数呈线性。
For hydrogen, hydrogen sulfide, ammonia and other detection usually use palladium film gate FET. A new type of platinum-film gate-field-effect transistor (FET) sensor is introduced, which can detect low concentration of phosphine. Its mechanism is not exactly the same as the detection of hydrogen by palladium gate-field effect transistor. The effect of temperature on the detection of phosphorane was also studied, and the work function values of platinum film gate field effect transistors at different concentrations of phosphine were measured. When the concentration of phosphine is in the range of 10 -6 to 1.5 × 10 -5, the logarithm of signal and phosphine concentration is linear.