论文部分内容阅读
采用X光激发光电子能谱(XPS)对经同步辐射软X光辐照的InP表面进行了分析。实验结果表明:InP表面辐照损伤与辐照X光的能量及剂量有关,尤其是具有近P原子K壳层共振吸收能量的软X光辐照与其它X射线辐照相比,其结果有所不同。文中就实验结果的机制进行了初步探讨。
X-ray photoelectron spectroscopy (XPS) was used to analyze the InP surface irradiated by synchrotron radiation soft X-rays. The experimental results show that the irradiation damage of InP surface is related to the energy and dose of X-ray irradiation, especially the soft X-ray irradiation with the resonance absorption energy of the near-P K shell shows that compared with other X-ray irradiation, Different. The experimental results of the mechanism of a preliminary study.