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为设计基于多路复用体全息光栅的角度放大器,建立了多路复用角度放大器(MAM)模型,从效率均衡性和角度分布均匀性两个方面归纳了其设计规则;研究了光刻过程中的误差对MAM性能的影响;分析了实际发散光束对MAM性能的影响.研究表明:控制光栅空间频率和光栅倾斜角可以实现需要的MAM角度分布,控制光栅厚度和折射率调制深度可以实现MAM最佳衍射效率;MAM最大复用路数不超过10路;增大光栅倾角或者记录光与工作光波长之比有利于抑制参考光角度误差带来的MAM出射角分布误差,减小光栅厚度有利于抑制厚度误差与折射率调制深度误差对衍射效率的影响;当远场发散角大于光栅角半宽时,最佳衍射效率下降到50%以下且角度选择曲线失去局部最小值;增大空间频率或者光栅厚度可以减小所需的折射率调制深度,增多MAM可复用路数,但是不利于效率均衡性设计和抑制发散光束的影响.
In order to design an angle amplifier based on the multiplexed volume holographic grating, a multiplexed angle amplifier (MAM) model is established, and its design rules are summarized from the aspects of efficiency equalization and angle distribution uniformity. The effects of the lithography process The effect of the actual divergent beam on the performance of MAM is analyzed.The results show that the controllable grating spatial frequency and grating tilt angle can achieve the required MAM angle distribution and the control of grating thickness and refractive index modulation depth can achieve MAM The best diffraction efficiency; the maximum number of multiplexed MAM does not exceed 10; increasing the grating tilt angle or the ratio of the recording wavelength to the working wavelength helps to suppress the distribution error of the MAM exit angle caused by the reference beam angle error and reduce the grating thickness When the far-field divergence angle is larger than half-width of the grating angle, the optimal diffraction efficiency decreases to less than 50% and the angle selection curve loses the local minimum; the space frequency increases Or the thickness of the grating can reduce the required depth of modulation of the refractive index and increase the number of MAM reusable channels, but this is not conducive to the efficiency of balanced design and suppression of divergence The influence of light beam.