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采用异质叠层方式制备出一定厚度的Ca(Mg_(1/3)Nb_(2/3))O_3/CaTiO_3(CMN/CT)叠层薄膜,研究了异质界面对薄膜结构、微观形貌及介电性能的影响及其规律.根据实验测试结果,提出CMN/CT叠层薄膜的模拟等效电路,建立介电常数和介电损耗的理论计算公式.结果表明:CMN/CT异质叠层薄膜具有完全正交钙钛矿结构,结构致密,厚度均匀,薄膜中存在独立的CMN和CT相.异质界面处存在过渡层,随着薄膜中异质界面个数增加,介电常数增大,介电损耗减小.减小界面过渡层的厚度,有利于提高CMN/CT叠层薄膜的介电性能.
A series of laminated films of Ca (Mg_ (1/3) Nb_ (2/3)) O_3 / CaTiO_3 (CMN / CT) with a certain thickness were prepared by heterogeneous lamination. The effects of heterogeneous interface on the microstructure, And the influence of dielectric properties and its regularity.According to the experimental test results, the equivalent circuit of CMN / CT laminated thin film is proposed and the theoretical formula of dielectric constant and dielectric loss is established.The results show that: CMN / CT heterogeneous stack The film has a completely orthorhombic perovskite structure with dense structure and uniform thickness, and there are independent CMN and CT phases in the film.The transitional layer exists at the heterogeneous interface, and as the number of heterogeneous interfaces in the film increases, the dielectric constant increases Large, dielectric loss is reduced.Improvement of the interface layer thickness, is conducive to improve the dielectric properties of CMN / CT laminated films.