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题目 作者 期 (页 )电子束技术正交图形簇畸变的校正研究及计算机仿真处理姚作宾 胡咏梅 肖义青 2 (31)………………………电子束曝光高斯分布束斑的MonteCarlo模拟任黎明 陈宝钦 3
Title Author Period (Page) Correction Research on Orthogonal Graphic Cluster Distortion Corrected by Electron Beam Technique and Computer Simulation Processing ZAO Zuobin HU Yongmei XIAO Yiqing 2 (31) ............... MonteCarlo Simulation of Gaussian Distribution Spot by Electron Beam Exposure Ren Liming, 3