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用P123作模板剂,通过正硅酸乙酯的水解缩聚和溶剂蒸发自组装过程在K9玻璃上制备介孔SiO2膜。应用FT-IR,XRD,N2吸附-脱附,AFM和UV-Vis表征手段研究了薄膜的介孔结构和光学性能,并使用“R-on-1”模式,以Nd:YAG脉冲激光(9.2 ns,1 064 nm)测试了薄膜的激光损伤阈值。结果表明:所镀制单层介孔SiO2膜具有规整的2D p6 mm长周期结构,为SBA-15型,膜层表面比较平整(均方根粗糙度为2.923 nm),在1 064 nm处的透过率为99.5%,换算为激光脉宽为1 ns时,膜层的激光损伤阈值为21.6 J/cm2,显示出了较好的减反性能和抗激光损伤性能。
Mesoporous SiO2 films were prepared on K9 glass by P123 as templating agent by hydrolytic polycondensation of tetraethyl orthosilicate and self-assembly by solvent evaporation. The mesoporous structure and optical properties of the films were investigated by means of FT-IR, XRD, N2 adsorption-desorption, AFM and UV-Vis characterization. The “R-on-1” (9.2 ns, 1 064 nm) The laser damage threshold of the film was tested. The results show that the monolayer mesoporous SiO2 film has a regular 2D p6 mm long-period structure, which is SBA-15 type. The surface of the mesoporous SiO2 film is relatively flat (root mean square roughness is 2.923 nm) and at 1 064 nm The transmittance of 99.5%, the laser pulse width of 1 ns, the laser damage threshold of the film is 21.6 J / cm2, showing good anti-reflection performance and anti-laser damage performance.