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分析了热释电非制冷红外探测技术的优势,介绍了当前应用较广泛的各种非制冷红外探测器用热释电材料,即单晶材料、高分子有机聚合物及复合材料和金属氧化物陶瓷及薄膜材料,并预计了热释电材料的发展趋势。指出了铁电性热释电陶瓷材料的优越性,其应用分为正常热释电体、介电测辐射热型热释电体和弥散相变热释电体,并分别列出了具有代表性材料的研究结果。最后,指出了研究高性能、大尺寸、易加工的热释电薄膜材料的制备技术,是未来红外探测器用热释电材料的发展的关键;并在此基础上结合半导体集成工艺,制备高性能、大规模的热释电红外焦平面阵列。
The advantages of pyroelectric uncooled infrared detection technology are analyzed. The current widely used pyroelectric materials for uncooled infrared detectors, namely single crystal materials, macromolecular organic polymers and composites, and metal oxide ceramics And thin film materials, and predict the development trend of pyroelectric materials. The advantages of ferroelectric pyroelectric ceramic materials are pointed out. The applications are divided into normal pyroelectric, pyroelectric pyroelectric and diffuse phase transition pyroelectric, Sexual Materials Research Results. Finally, it is pointed out that the research on the preparation technology of pyroelectric thin film materials with high performance, large size and easy processing is the key to the future development of pyroelectric materials for infrared detector. Based on this, the integrated semiconductor technology is used to prepare high performance , A large-scale pyroelectric infrared focal plane array.