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为实现用真空磁控溅射镀技术对玻璃进行连续式镀膜,设计了一条基于PLC的自动化生产线。在精确控制镀膜时间和靶电流,保持电压不变的条件下,通过闭环控制实现镀膜室的工作气体气压恒定控制.从而得到稳定的沉积速率,最终在实验中利用真空磁控溅射镀膜方法制备出分布均匀、附着性强和特定厚度的膜层。通过上位机软件对参数值进行最优控制,在提高沉积速率的同时实现了玻璃大批量深加工的目的。
In order to achieve continuous coating of glass by vacuum magnetron sputtering technology, a PLC-based automated production line was designed. Under the condition that the coating time and the target current are exactly controlled and the holding voltage is constant, the working gas pressure of the coating chamber is controlled constantly by the closed-loop control so as to obtain a stable deposition rate, and finally the vacuum magnetron sputtering coating method is used in the experiment Out of uniform, strong adhesion and a specific thickness of the film. Through the upper computer software to optimally control the parameter values, it can achieve the purpose of large-volume glass deep processing while increasing the deposition rate.