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一、硅的等离体及低温工艺的必要性 低温和等离子体工艺现在成为LSI技术中很引人注目的技术。它们可以为LSI提供一个有力的工艺手段,低温工艺的好处是:
I. The Necessity of Plasma and Cryogenic Processes of Silicon The cryogenic and plasma processes are now a compelling technology in LSI technology. They can provide LSI with a powerful process, the benefits of low temperature process are: