论文部分内容阅读
本文所叙述的以电子的直接投影为基础的表面微几何形状的分析方法是绝对测量法,因为这种方法使有可能看见并测量出表面的实际轮廓。新方法的实质是基于散发电子束在如图1所表示的真空仪中的直接投影。
The method of analysis of the surface micro-geometry based on direct projection of electrons described herein is absolute measurement because it makes it possible to see and measure the actual contour of the surface. The essence of the new method is based on the direct projection of the emanating electron beam in a vacuum as represented in FIG. 1.