红外小光点扫描系统是检测红外探测器性能的关键设备,它可以用来检测红外探测器的有效光敏面、响应率的均匀性、多元器件的串音及一致性等性能参数. 国内外陆续报道过各种小光点扫描系统[1-5],它们大都工作在波长小于2μm的近红外波段.为了解决在长波范围内红外探测器的测试问 Infrared small spot scanning system is the key equipment to detect the performance of infrared detector, which can be used to detect the infrared detector’s effective photosensitive surface, response rate uniformity, multi-component crosstalk and consistency and other performance parameters. A variety of small spot scanning systems have been reported [1-5], most of which work in the near-infrared wavelength range of less than 2μm.In order to solve the problem of long-wave infrared detector testing