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低温共烧陶瓷(LTCC)技术是实现电子设备小型化、高密度集成化的主流封装/组装集成技术,可适用于耐高温、耐受恶劣环境下的特性要求。报道了以LTCC为结构材料设计、制作的一种MEMS差分电容式加速度计。该器件的敏感质量、4根悬臂梁结构都内嵌于LTCC多层基板,质量块和上下盖板之间通过印刷电极组成差分电容对;高精度电容检测芯片表贴于LTCC基板表面,将差分电容信号转化为电压信号。论文讨论了微机械LTCC加速度计的设计与制备、检测电路和性能测试。LTCC的高密度多层布线减小了互连线的长度和相关耦合寄生电容;基于集成芯片的检测电路解决了分立式检测电路的引起噪声大、电路复杂等问题。测试结果表明:该加速度计结构灵敏度较高,小载荷情况下表现出良好的线性关系,灵敏度约为30.3 m V/gn。
Low-temperature co-fired ceramic (LTCC) technology is a mainstream package / assembly integrated technology that enables the miniaturization and high-density integration of electronic equipment, and is suitable for the characteristic requirements of high temperature resistance and harsh environment. A MEMS differential capacitive accelerometer designed and fabricated with LTCC is reported. The sensitive quality of the device, four cantilever structures are embedded in the LTCC multilayer substrate, the mass between the upper and lower cover plate through the printed electrodes to form a differential capacitor pair; high-precision capacitance detection chip surface mounted on the LTCC substrate surface, the differential Capacitance signal into a voltage signal. The paper discusses the design and preparation of micro-machined LTCC accelerometer, detection circuit and performance testing. The LTCC’s high-density multi-layer wiring reduces the length of interconnect lines and the associated coupling parasitic capacitance. The detection circuit based on integrated chip solves the problems of discrete detection circuit such as large noise and complicated circuits. The test results show that the accelerometer has a high sensitivity and a good linearity under a small load with a sensitivity of about 30.3 mV / gn.