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研究了退火质子交换LiNbO3平板波导的制作和表征 ,应用“选择零元法”研究了退火后折射率分布 ,建立了波导参数和制作条件的联系 ,获得了导波层的色散关系 ,所得到的表征结果对退火质子交换波导在光子器件中的应用提供了有用信息
The fabrication and characterization of annealed proton exchange LiNbO3 slab waveguide were studied. The refractive index distribution after annealing was studied by using “Select Zero Element Method”. The relationship between waveguide parameters and fabrication conditions was established, and the dispersion relation of the waveguide layer was obtained. The characterization results provide useful information for the application of annealing proton exchange waveguide in photonic devices