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在非接触式的激光切割焦点位置检测与控制系统中,切割加工中产生的等离子体对电容传感器产生干扰,从而导致焦点位置检测误差。本文根据电容原理定量地分析了等离子体对电容传感器干扰产生的误差,进而提出了消除等离子体于扰的措施。
In the non-contact laser cutting focus position detection and control system, the plasma generated during the cutting process interferes with the capacitive sensor, resulting in focus position detection errors. According to the principle of capacitance, this paper quantitatively analyzes the error caused by the plasma on the capacitive sensor interference, and then puts forward the measures to eliminate the interference of plasma.