论文部分内容阅读
一、前言利用现有的氢还原氯化硅的标准方法来生产多晶硅需要大量的电能。而且生产成本随着电能费用的增加而增加。为了降低生产成本,试图把利用太阳射线作为
I. INTRODUCTION The use of existing standard methods of hydrogen reduction of silicon chloride to produce polysilicon requires a large amount of electrical energy. And the cost of production increases with the cost of electricity. In order to reduce production costs, try to use the sun as the ray