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介绍了一种Si基热光Fabry Perot (F P)腔可调谐滤波器 .F P腔由电子束蒸发的非晶硅构成 .利用非晶硅的热光效应 ,通过对Si腔加热 ,改变F P腔的折射率 ,从而引起透射峰位的红移 .该原型器件调谐范围为 1 2nm ,透射峰的FWHM (峰值半高宽 )为 9nm ,加热效率约为 0 1K/mW .精确控制DBR(分布式Bragg反射镜 )生长获得高反射率镜面是减小带宽的有效途径 ;通过改进加热器所处位置及增强散热能力 ,有望进一步提高加热效率
A Si-based Fabry-Perot (FP) cavity tunable filter is introduced. The FP cavity consists of amorphous silicon evaporated by electron beam. By using the thermo-optic effect of amorphous silicon, Refractive index, resulting in the red shift of the transmission peak.The prototype device tuning range of 1 2nm, the FWHM (peak full width at half maximum) of the transmission peak is 9nm, the heating efficiency is about 0 1K / mW. Precise control DBR (distributed Bragg Mirrors) Growth Obtaining high reflectivity mirrors is an effective way to reduce the bandwidth; it is expected to further improve the heating efficiency by improving the location of the heater and enhancing heat dissipation