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为改善气体传感器性能,通过器件优化设计获得了一种应用于气体传感器的具有低损耗、高品质因子(Q)的单模式两端对声表面波(SAW)谐振器。该谐振器由两个换能器、分置于换能器两边的短路栅反射器以及在换能器之间分布的用于敏感膜镀膜的约2.5 mm金属薄层构成。谐振器采用铝/金双层电极以降低测试气体环境的腐蚀影响。利用经典耦合模(COM)理论对器件性能进行了仿真以提取优化的结构设计参数。基于仿真结果,实验研制了基于300 MHz频率的新型铝/金电极SAW两端对谐振器,测试结果显示所研制器件具有较低损耗(<7 dB),较高Q值(~3000)以及单一谐振模式的特点,并且,以所研制的新型谐振器为频率控制单元的谐振器型振荡器表现出良好的频率稳定度(士15 Hz/h),这对于改善气体传感器的检测下限及稳定性等性能指标具有重要意义。
To improve the performance of the gas sensor, a single-mode two-terminal SAW resonator with low loss and high quality factor (Q) for gas sensors is obtained through device optimization design. The resonator consists of two transducers, a shorting-out grid reflector that is subdivided on both sides of the transducer, and a thin layer of about 2.5 mm of metal used for sensitive film coating distributed between the transducers. Resonators use aluminum / gold double-layer electrodes to reduce the corrosive effects of the test gas environment. The device performance is simulated using classical coupled-mode (COM) theory to extract optimized structural design parameters. Based on the simulation results, a new SAW end-to-end resonator based on 300 MHz frequency was experimentally developed. The test results show that the developed device has lower loss (<7 dB), higher Q (~ 3000) and single Resonant mode, and the new type of resonator developed for the frequency control unit resonator type oscillator shows good frequency stability (± 15 Hz / h), which is to improve the gas detection limit and stability Other performance indicators are of great significance.