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为在激波风洞中测量尖锐前缘等曲率半径很小处的表面热流率,俞鸿儒提出一种整体式热流传感器.与传统的热流传感器相比,整体式热流传感器空间分辨率提高了一个数量级,感应元件的最小尺寸仅为直径0.1 mm,可以测量R0.5 mm的球锥驻点热流.通过双组元电子束物理气相沉积的方法,制备康铜薄膜,形成整体式热流传感器的接点层.并利用数值计算,分析了传感器结构对测量精度的影响.激波风洞试验结果表明,本文制备的整体式热流传感器频响约100 kHz,测量重复性误差小于10%.
Yu Hongru proposed a monolithic heat flow sensor for measuring the surface heat flux at a sharp radius of curvature such as a sharp leading edge in a shock tunnel.Compared with the traditional heat flow sensor, the spatial resolution of the monolithic heat flow sensor is increased by one The order of magnitude, the minimum size of the sensing element is only 0.1 mm in diameter, can measure the R0.5 mm of the ball-point stagnation heat flow through the bicomponent electron beam physical vapor deposition method, the preparation of Kang copper film to form integrated heat flux sensor contacts The influence of the sensor structure on the measurement accuracy is analyzed by numerical calculation.The experimental results of shock wind tunnel show that the monolithic heat flow sensor prepared in this paper has a frequency response of about 100 kHz and the measurement repeatability error is less than 10%.