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对ＶＯ２薄膜进行不同剂量的γ辐照处理，利用ＳＥＭ和ＸＰＳ对辐照前后的薄膜进行分析，发现γ辐照诱导Ｖ离子出现不同价态之间的转变现象，并且价态变化的程度和方向与辐照剂量有关；较低剂量γ辐照在薄膜表面造成显著损伤，当辐照剂量增大时，γ射线在ＶＯ２薄膜中产生退火效应，使薄膜表面质量得到改善。辐照后的ＶＯ２薄膜光透射特性测试结果与上述结论相合，对辐照诱导的价态变化和退火效应的机理进行了讨论。
The VO2 films were treated with different doses of γ radiation, SEM and XPS were used to analyze the films before and after irradiation. It was found that the γ-radiation induced the transition between different valence states of V ions, and the degree and direction of valence changes Which is related to the dose of radiation. The lower dose of γ irradiation caused significant damage on the surface of the film. When the radiation dose was increased, the γ-ray was annealed in the VO2 film to improve the surface quality of the film. The results of the light transmission characteristics of the irradiated VO2 thin film coincide with the above conclusions, and the mechanism of the valence induced by the irradiation and the annealing effect are discussed.