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简要叙述软x射线多层膜位相光栅的理论设计、实验制备,详细给出了在北京同步辐射装置3B1束线上对多层膜位相光栅衍射效率的测试,以及对测试结果的分析,并与理论值进行了比较.
The theoretical design and experimental preparation of the phase grating of soft x-ray multilayers are briefly described. The diffraction efficiency of the multi-layer phase grating on 3B1 beam line of Beijing synchrotron radiation unit is given in detail and the results of the test are also analyzed. The theoretical values are compared.