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本文叙述了在较宽温区内硅压力传感器的非线性温度特性及新的灵敏度补偿方法。在-15～150℃温区内对几个表面杂质浓度测量了温度特性。灵敏度和阻值可以近似为温度的二次方程式。对于几个表面杂质浓度计算了线性温度项系数和平方温度项系数。研制成了一种温度补偿方法。补偿是利用有不同表面浓度的两个电阻器的线性温度项系数和平方温度项系数的结合方法进行的。通过电子计算机模拟验证了这种补偿方法,结果灵敏度误差为0.7％/200℃。
This paper describes the nonlinear temperature characteristics of silicon pressure sensors in a wide temperature range and the new sensitivity compensation method. Temperature characteristics were measured for several surface impurity concentrations in a temperature range of -15 to 150 ° C. Sensitivity and resistance can be approximated as a temperature quadratic equation. The linear temperature coefficient and the square temperature coefficient are calculated for several surface impurity concentrations. Developed a temperature compensation method. Compensation is made using a combination of linear temperature coefficient and square temperature coefficient of two resistors with different surface concentrations. The compensation method was verified by computer simulation. The sensitivity error was 0.7% / 200 ℃.