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本文介绍了一种新结构的硅一体化微加速度传感器，理论和实验结果表明，这种传感器与传统硅微机械结构加速度传感器相比具有温度特性好、工艺简单和成品率高等优点。这种结构特别适合制作谐振传感器。
This paper introduces a new structure of silicon integrated micro-acceleration sensor, the theoretical and experimental results show that compared with the traditional silicon micro-mechanical structure of the acceleration sensor has the advantages of good temperature characteristics, simple process and high yield. This structure is particularly suitable for making resonance sensors.