日本硅公司和三菱材料公司开发了半导体单晶硅的连续直拉法——SCCZ 法,日本硅公司新建了一台专用炉,经试生产,从91年8月起正式投产并开始出售产品。生产能力为每月生产一万片5英寸硅片。此外,还在6英寸试验炉上连续直拉成功2米多长的单晶硅。其它硅厂也在进行连续直拉法的研 Japan’s silicon company and Mitsubishi Materials developed a semiconductor CZ continuous Czochralski method, Japan’s silicon company built a special furnace, the pilot production, from August 1991 formally put into operation and began selling the product. Production capacity of 10,000 per month for the production of 5-inch silicon. In addition, the success of 6-inch continuous straight pull test 2 meters long monocrystalline silicon. Other silicon plants are also conducting continuous CZ research