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本文介绍了用冠醚除杂减少硅表面的碱金属杂质沾污的简单方法。并且应用“高频CV特性测试仪”和“半导体杂质浓度分布测试仪”分别测量外延硅单晶在冠醚除杂前后表面可动杂质离子的浓度变化及杂质浓度的纵向分布。最后估算了冠醚分子络合碱金属离子的结合能。
This article describes a simple method of removing contaminants with crown ethers to reduce the contamination of silicon surfaces with alkali metals. And the changes of the concentration and the vertical distribution of impurity concentration in the surface of the epitaxial silicon single crystals before and after removal of crown ether were measured by using “high-frequency CV characteristic tester” and “semiconductor impurity concentration distribution tester” respectively. Finally, we estimated the binding energy of the crown ether molecule to complex alkali metal ions.