为了分析纳米级两维微位移工作台引入的测量误差 ,介绍了其机械结构及工作原理 ,进行了定位准确度实验和运动方向的直线度 (偏摆 )实验 ,实验结果表明 ,工作台的定位准确度较高 ,运动方向的直线度在工作台工作范围内无需修正 ,即可满足高精度测量的需要 In order to analyze the measurement error introduced by the nanometer two-dimensional micro-displacement workbench, the mechanical structure and working principle are introduced. The experiments of the positioning accuracy and the straightness (yawing) of the movement direction are carried out. The experimental results show that the positioning of the worktable High accuracy, straightness of the direction of movement in the working area of ​​the table without correction, you can meet the needs of high-precision measurement