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采用磁控溅射方法制备W/DLC/W-S-C复合膜,研究不同WSx含量对复合膜结构和结合强度的影响;采用球-盘式摩擦试验仪研究复合膜在大气环境以及氮气环境下的摩擦磨损性能。结果表明:复合膜结构致密,在非晶类金刚石基质中存在WSx和WCx化合物。合适的WSx含量有利于提高复合膜的膜/基结合强度。在大气环境下,随着C含量的增加复合膜的耐磨性能提高,其摩擦因数在0.15~0.25之间;在氮气环境下,随着WSx含量的增加复合膜的耐磨性能提高,其摩擦因数在0.03~0.10之间。
The W / DLC / WSC composite films were prepared by magnetron sputtering. The effects of different WSx contents on the structure and bonding strength of the composite films were investigated. The friction and wear of the composite films under atmospheric and nitrogen conditions were investigated by ball-and-disk friction tester performance. The results show that the composite membrane has a dense structure and WSx and WCx compounds exist in the amorphous diamond matrix. The appropriate WSx content is conducive to improve the film / base bonding strength of the composite film. Under atmospheric conditions, the wear resistance of the composite films increased with the increase of C content, and the friction coefficient was between 0.15 and 0.25. Under the nitrogen atmosphere, the wear resistance of the composite films increased with the increase of WSx content, The factor is between 0.03 and 0.10.