本文提出了一种改进的铝合金化新工艺.该工艺是将一次铝合金化后的硅片表面层用磷酸腐蚀后,经去离子水彻底清洗,然后进行二次蒸铝及合金化.经此工艺处理后,可改善铝层表面小丘状态,提高粘附性,改善其抗电迁移性能.此法工艺简单,成本低. In this paper, an improved new process of aluminum alloying is proposed, in which the primary aluminum alloy surface is etched with phosphoric acid, thoroughly cleaned with deionized water and then subjected to secondary steaming and alloying. After the process is processed, the condition of the hillock on the surface of the aluminum layer can be improved, the adhesion and the anti-electromigration performance can be improved, and the method has the advantages of simple process and low cost.