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涡旋干泵是世界范围内同步辐射光源应用较多的真空获得设备,为满足同步辐射光源真空系统清洁、稳定和排气量大的需求,对涡旋干泵极限压力、抽气速率和清洁度三个性能有很高的要求。设计了一套涡旋干泵性能测试的综合平台并通过实际干泵测试来检验平台的设计。测试结果表明,综合性能平台能有效得测试上述涡旋干泵性能指标,为应用于同步辐射光源的涡旋干泵选泵工作提供测试手段和平台。
Vortex dry pump is the world wide use of synchrotron radiation light source to obtain more equipment to meet the synchrotron radiation source vacuum system clean, stable and large displacement of the demand for the vortex dry pump ultimate pressure, pumping rate and cleaning Degree of three high performance requirements. A comprehensive platform for the performance testing of vortex dry pumps was designed and the platform design was verified by actual dry pump tests. The test results show that the comprehensive performance platform can effectively test the performance index of the scroll dry pump, and provide a test method and a platform for the pump selection of the scroll dry pump applied to the synchronous radiation source.