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提出了基于平面圆形薄板结构光纤光栅(FBG)动态压力传感器的实现方法,从理论上分析了其静态灵敏度和动态频率响应特性,并且采用振动液柱法和电磁力发生器对其灵敏度和动态特性进行了实验研究。平面薄板采用不锈钢材质、厚度为0.15 mm、直径为15 mm,对于该尺寸结构的传感器,静态灵敏度可达0.02 pm/Pa,比裸光栅增敏6 300倍,谐振频率为7.8 kHz,而且幅频特性在0~6.5 kHz频率范围内较为平坦。研究表明:对该结构薄板的几何尺寸进行适当的调整,可实现不同量程、不同带宽的压力测量。
The realization method of FBG dynamic pressure sensor based on planar circular thin-plate structure FBG is put forward. The static sensitivity and dynamic frequency response characteristics of the FBG are theoretically analyzed. The vibration sensitivity and dynamic response Characteristics of the experimental study. The flat sheet is made of stainless steel and has a thickness of 0.15 mm and a diameter of 15 mm. For this size sensor, the static sensitivity is 0.02 pm / Pa, which is 6,300 times higher than that of the bare grating. The resonant frequency is 7.8 kHz. Features are flatter in the frequency range 0-6.5 kHz. The research shows that the proper adjustment of the geometrical size of the structure sheet can realize the pressure measurement of different ranges and different bandwidths.