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美国光学联合有限公司报道:他们生产的远紫外曝光系统的光源能把恒定光强的照明投送到片子表面且能保证照度均匀。该机的盒对盒式片子输送系统具有送一接升降机,一枚500瓦的远紫外光源和一个恒光强的电源。通过调谐一个单透镜,可以调节片子平面上曝光光强的均匀度。为了便于整套设备的安装,只要通过一个用铰链铰着的门便可看到这种灯。对用户选择的抗蚀剂,该机有三种不同的波长系统可作调节使用。由于采用敏感元件来探测片子表面光强的细微变化,并能瞬时调节灯的电流;使光强修正到正常值,所以不管灯的老化也好,电源的漂移也好,片子平面上的光强都能保持恒定(在±2％之内。)
American Optical Co., Ltd. reported: they produced a far-UV exposure system light source can be a constant light intensity of the lighting cast to the surface of the film and to ensure uniform illumination. The machine’s cassette-to-cassette delivery system features a pick-up elevator, a 500-watt deep-UV light source and a constant-intensity power supply. By tuning a single lens, you can adjust the uniformity of the exposure light intensity on the film plane. In order to facilitate the installation of the entire equipment, it is only visible through a hinged door. The choice of user-selected resist, the aircraft has three different wavelength system can be used for regulation. As the use of sensitive components to detect the subtle changes in the film surface light intensity and instantaneous adjustment of the lamp current; to correct the light intensity to normal, so no matter the aging of the lamp or the power of the drift is good, the light intensity on the film plane Can be kept constant (within ± 2%.)