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介绍了一种1530nm透射、1560nm反射和45°工作列近红外分色片的设计与制备方法。选择Ta2O5和SiO2两种光学薄膜材料,采用多谐振腔法布里-珀罗(F-P)窄带滤光片结构作为初始膜系,并选择4H作为谐振腔的间隔层进行消偏振设计,实现分色片透、反射过渡区域的压缩。采用电子束蒸发加离子辅助沉积技术,并应用光学极值法监控各膜层厚度,实现分色片多层膜的制备。利用分光光度计对分色片的光谱进行了分析测试,结果表明研制出的分色片在工作波长的光学能量传递效率高于92%,适用于空间激光通信系统中不同波长信号的分离与高效传递。
A design and preparation method of 1530nm transmission, 1560nm reflection and 45 ° working column NIR separation are introduced. Two kinds of optical films, Ta2O5 and SiO2, were chosen. The multi-resonator Fabry-Perot (FP) narrow-band filter was used as the initial film system, and 4H was chosen as the spacer of the resonant cavity to depolarize. Film through, reflecting the transition area of compression. Electron beam evaporation and ion-assisted deposition techniques were used, and the optical extreme value method was used to monitor the film thickness to achieve the preparation of the multi-layer film. The spectrophotometer was used to analyze and test the spectrum of the dichroic films. The results showed that the optical energy transfer efficiency of the dichroic films was higher than 92% at the working wavelength. It is suitable for the separation and efficiency of different wavelength signals in the space laser communication system transfer.