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利用高分辨率光谱分析仪对空气隙F P标准具透射谐振峰频率进行测量 ,然后通过直线拟合获得自由谱域 ,从而计算得出F P标准具的间距。对F P标准具间距测量的精度进行分析 ,F P标准具间距测量的相对误差为2× 10 -3 。提出了一种新颖的入射光与F P标准具垂直的精确调节方法
A high-resolution spectral analyzer is used to measure the transmitted resonant peak frequency of the air-gap F P etalon, and the free spectral domain is obtained by a straight-line fitting to calculate the spacing of F P etalons. The accuracy of F P etalon spacing measurement was analyzed. The relative error of F P etalon spacing measurement was 2 × 10 -3. A novel method of accurate vertical adjustment of incident light and F P etalon is proposed