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Ｌａｍ公司第三代高密度金属蚀刻Ｌａｍ公司第三代高密度金属蚀刻为了满足０１８μｍ金属蚀刻生产率的要求，Ｌａｍ拓展了高密度ＴＣＰ（变压器耦合离子源）技术。它已为全世界安装了１０００台ＴＣＰ装置，因此Ｌａｍ所提供的技术，又一次超越了市面上任何一家公司的Ｔ...
Lam’s third generation high-density metal etch Lam’s third-generation high-density metal etch Lam has expanded its high-density TCP (Transformer Coupled Ion Source) technology to meet the metal etch productivity of 0.18 μm. It has installed 1000 TCP devices for the world, so Lam’s technology once again surpasses any company in the market.