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微流控芯片在分析化学和生物检测方面有着广阔的应用前景。对集成电极的PDMS-玻璃微流控芯片的制备工艺进行了研究与分析。最终使用SU-8快速制备阳模,使用PDMS转移图形得到具有微流控通道的PDMS盖片;在玻璃基板上加工Pt电极,除了需要外露的部分电极外,其他部分以薄层PDMS保护,得到电极基板;将PDMS盖片与电极基板半固化键合制得同时具有加热和温度传导电极以及CE高压电极的PDMS-玻璃芯片。ANSYS模拟分析证明加热芯片热惯性小,加热时温度分布效果好。
Microfluidic chips in the analytical chemistry and biological detection has broad application prospects. The preparation technology of PDMS-glass microfluidic chip with integrated electrodes was studied and analyzed. Finally, the male molds were prepared rapidly by using SU-8. The PDMS cover film with microfluidic channels was obtained by PDMS transfer patterning. The Pt electrodes were processed on the glass substrate except for the exposed part of the electrodes, and the other parts were protected by a thin layer of PDMS. Electrode substrate; PDMS cover film and the electrode substrate semi-cured bonded with a heating and temperature conduction electrode and the CE high voltage electrode PDMS-glass chip. ANSYS simulation analysis shows that the thermal inertia of the heating chip is small, and the temperature distribution effect is good when heated.