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介绍了一种能同时实现轴向和径向微量过给的一两座标微动伺服装置。该装置由电致伸缩器件驱动，采用整体式双柔性铰链结构。以数字信号处理器TMS320C25为中心的控制系统自成体系，能实现高速输入输出操作和快速数学运算。文中主要阐述了其微进给原理、控制系统组成、控制方法，并对实验结果进行了详细的分析。实验结果表明，两座标微动伺服装置位移量大于±3μm，定位分辨率高于0．01μm。
A kind of one or two coordinate micro-servo devices that can realize both axial and radial micro-overshoot is introduced. The device is driven by an electrostrictive device with an integral double flexure hinge structure. A digital signal processor TMS320C25-centric control system self-contained system, enabling high-speed input and output operations and fast mathematical operations. In this paper, the principle of micro feed, the composition of control system and the control method are mainly described. The experimental results are analyzed in detail. Experimental results show that the displacement of the two-coordinate micro-servo device is greater than ± 3μm and the positioning resolution is higher than 0.01μm.