For low power dielectric barrier discharge (DBD) used in small-size material treatment or portable devices, high-step transformer parasitic capacitance greatly influences the performance of the resonant converter as it is of the same order of magnitude as the equivalent capacitance of DBD load. In this paper, steady-state analysis of the low power DBD is presented, considering the inevitable parasitic capacitance of the high-step transformer. The rectifier-compensated first harmonic approxi-mation (RCFHA) is applied to linearize the equivalent load circuit of DBD at low frequency and the derived expressions are accurate and convenient for the analysis and design of the power supply. Based on the proposed linear equivalent load circuit, the influence of transformer parasitic capacitance on the key parameters, including the frequency range and the applied electrode voltage, is discussed when the power is regulated with pulse frequency modulation (PFM). Also, a design procedure is presented based on the derived expressions. A prototype is constructed according to the design results and the accuracy of the design is verified by experimental results.