论文部分内容阅读
采用多靶反应磁控溅射技术制备不同Al含量的Zr-Al-N复合膜及不同Si含量的Zr-Al-Si-N复合膜。采用能谱仪、X射线衍射仪和显微硬度计对薄膜进行测试,研究Al含量对Zr-Al-N复合膜微结构和力学性能的影响以及Si含量对Zr-Al-Si-N复合膜微结构和力学性能的影响。结果表明,当Al含量为13.97at%时,Zr-Al-N复合膜的硬度达到最大,最大值为27.16 GPa,随着Al含量的继续增加,薄膜由B1(NaCl型面心立方结构)型结构向B1-B4(ZnS型纤锌矿结构)型双相结构转变,硬度急剧降低;当Si含量为18.79at%时,Zr-Al-Si-N复合膜的硬度达到最大,最大值为34.43 GPa,进一步增加Si含量薄膜向非晶态转化,薄膜硬度降低。
Zr-Al-N composite films with different Al contents and Zr-Al-Si-N composite films with different Si contents were prepared by multi-target reactive magnetron sputtering. The effects of Al content on the microstructure and mechanical properties of Zr-Al-N composite films and the influence of Si content on the microstructure and mechanical properties of Zr-Al-Si-N composite films were investigated by energy dispersive spectroscopy, X-ray diffraction and microhardness tester. Effect of Microstructure and Mechanical Properties. The results show that the hardness of Zr-Al-N composite film reaches the maximum when the content of Al is 13.97at%, and the maximum value is 27.16 GPa. With the increase of Al content, the film consists of B1 (NaCl-type face-centered cubic) The hardness of the Zr-Al-Si-N composite film reaches the maximum at a Si content of 18.79 at%, the maximum value is 34.43 GPa, to further increase the Si content of the film to amorphous transformation, film hardness decreased.