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采用快速退火和常规退火两种不同热处理方式制备Li1.3Al0.3Ti1.7(PO4)3薄膜,用X射线衍射、扫描电子显微镜、循环伏安及交流阻抗等技术分析检测薄膜物相、形貌、电化学窗口、离子电导率及电导活化能。结果表明,两种退火方式制备的薄膜均为纯相Li1.3Al0.3Ti1.7(PO4)3,制备的薄膜均匀、无龟裂,但采用快速退火制备的薄膜晶粒比采用常规退火制备的薄膜要小,薄膜更光滑更致密。两种退火方式制备的薄膜电化学窗口都超过了2.4 V,薄膜离子电导率分别为2.7×10-6 S/cm和1.4×10-6 S/cm。采用快速退火制备的Li1.3 Al0.3 Ti1.7(PO4)3薄膜离子电导活化能比采用常规退火制备的薄膜要小。
Li1.3Al0.3Ti1.7 (PO4) 3 thin films were prepared by rapid thermal annealing and conventional annealing. The films were characterized by X-ray diffraction, scanning electron microscopy, cyclic voltammetry and AC impedance spectroscopy , Electrochemical window, ionic conductivity and conductance activation energy. The results show that both thin films prepared by the two annealing methods are pure Li1.3Al0.3Ti1.7 (PO4) 3, the prepared films are uniform and without cracks. However, the films prepared by rapid annealing have better crystallinity than those prepared by conventional annealing The film is smaller, the film is smoother and more dense. The electrochemical windows of the films prepared by the two annealing methods all exceeded 2.4 V, and the ionic conductivities of the films were 2.7 × 10-6 S / cm and 1.4 × 10-6 S / cm, respectively. The Li1.3 Al0.3 Ti1.7 (PO4) 3 thin films prepared by rapid annealing have smaller ionic conductivities than those prepared by conventional annealing.